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Öğe 157-nm Laser Micromachining of N-BK7 Glass and Replication for Microcontact Printing(Springer-Verlag, 2003) Dyer, P. E.; Maswadi, S. M.; Walton, C. D.; Ersöz, Mustafa; Fletcher, P. D. I. ; Paunov, V. N.We report etch-rate and probe-beam-deflection studies of N-BK7 glass ablated using a 157-nm F-2 laser. It is found that controllable material removal at the nanometre level is possible above an ablation threshold of 250 mJ cm(-2). Contact mask printing shows well-defined features can be micromachined in this glass with sub-micron resolution capability. Micro-features produced in this way have been replicated by polydimethylsiloxane (PDMS) moulding and the stamps used to print arrays of fluorescent molecules with sub-micron fidelity.
