157-nm Laser Micromachining of N-BK7 Glass and Replication for Microcontact Printing
Yükleniyor...
Dosyalar
Tarih
2003
Dergi Başlığı
Dergi ISSN
Cilt Başlığı
Yayıncı
Springer-Verlag
Erişim Hakkı
info:eu-repo/semantics/openAccess
Özet
We report etch-rate and probe-beam-deflection studies of N-BK7 glass ablated using a 157-nm F-2 laser. It is found that controllable material removal at the nanometre level is possible above an ablation threshold of 250 mJ cm(-2). Contact mask printing shows well-defined features can be micromachined in this glass with sub-micron resolution capability. Micro-features produced in this way have been replicated by polydimethylsiloxane (PDMS) moulding and the stamps used to print arrays of fluorescent molecules with sub-micron fidelity.
Açıklama
Anahtar Kelimeler
Kaynak
Applied Physics a-Materials Science & Processing
WoS Q Değeri
Q2
Scopus Q Değeri
Q2
Cilt
77
Sayı
03.04.2020
Künye
Dyer, P. E., Maswadi, S. M., Walton, C. D., Ersöz, M., Fletcher, P. D. I., Paunov, V. N., (2003). 157-nm Laser Micromachining of N-BK7 Glass and Replication for Microcontact Printing. Applied Physics a-Materials Science & Processing, (77), 391-394. Doi: 10.1007/s00339-002-1936-0
