Initiation of 2-Hydroxyethyl Methacrylate Polymerization by Tert-Butyl Peroxide in a Planar PECVD System

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dc.contributor.authorGursoy, Mehmet
dc.contributor.authorUcar, Tuba
dc.contributor.authorTosun, Zahide
dc.contributor.authorKaraman, Mustafa
dc.date.accessioned2020-03-26T19:24:44Z
dc.date.available2020-03-26T19:24:44Z
dc.date.issued2016
dc.departmentSelçuk Üniversitesien_US
dc.description.abstractThis article reports on the deposition conditions and characterization of poly(2-hydroxyethyl methacrylate) thin films grown by initiated plasma enhanced chemical vapor deposition process. The plasma power is inductively coupled into the process chamber with a planar-coil antenna through a quartz window, and the substrate is cooled to promote physical adsorption of monomers on its surface. The introduction of the initiator allowed for film deposition at very low plasma powers (1W) and greatly improves the deposition rates. Fourier transform infrared (FTIR) and X-ray photoelectron spectroscopy (XPS) analyses confirmed that the chemical functionalities of the monomers are preserved to a good extent during the depositions that were carried out at low plasma powers. The deposition kinetics of PECVD-produced films from HEMA can be tailored by varying the substrate temperature. The apparent activation energies observed from PHEMA deposition kinetics with varying substrate temperatures are observed to be negative, which supports the hypothesis of the free radical polymerization mechanism in the PECVD PHEMA deposition.en_US
dc.description.sponsorshipScientific and Technological Research Council of Turkey (TUBITAK)Turkiye Bilimsel ve Teknolojik Arastirma Kurumu (TUBITAK) [213M399]en_US
dc.description.sponsorshipThis project was supported by the Scientific and Technological Research Council of Turkey (TUBITAK) with a grant number of 213M399.en_US
dc.identifier.doi10.1002/ppap.201500091en_US
dc.identifier.endpage446en_US
dc.identifier.issn1612-8850en_US
dc.identifier.issn1612-8869en_US
dc.identifier.issue4en_US
dc.identifier.scopusqualityQ2en_US
dc.identifier.startpage438en_US
dc.identifier.urihttps://dx.doi.org/10.1002/ppap.201500091
dc.identifier.urihttps://hdl.handle.net/20.500.12395/33714
dc.identifier.volume13en_US
dc.identifier.wosWOS:000374550400005en_US
dc.identifier.wosqualityQ1en_US
dc.indekslendigikaynakWeb of Scienceen_US
dc.indekslendigikaynakScopusen_US
dc.language.isoenen_US
dc.publisherWILEY-V C H VERLAG GMBHen_US
dc.relation.ispartofPLASMA PROCESSES AND POLYMERSen_US
dc.relation.publicationcategoryMakale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanıen_US
dc.rightsinfo:eu-repo/semantics/closedAccessen_US
dc.selcuk20240510_oaigen_US
dc.subjectinitiatoren_US
dc.subjectPECVDen_US
dc.subjectPHEMAen_US
dc.subjectplasma polymeren_US
dc.subjectsubstrate temperatureen_US
dc.titleInitiation of 2-Hydroxyethyl Methacrylate Polymerization by Tert-Butyl Peroxide in a Planar PECVD Systemen_US
dc.typeArticleen_US

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